Using the imprint method for single replication of polymeric Fresnel optics and micro-optics

摘要

This paper discusses the use of the imprint method for single replication of polymeric Fresnel optics and micro-optics. The conditions for carrying out the process that provide the best accuracy in rendering fine details are determined, in particular the vacuum treatment of siloxane and UV-hardenable acrylate involving flow into a matrix. The accuracy with which the shape of an optical surface is rendered during replication is estimated. (C) 2008 Optical Society of America.