Elimination of scanning electron microscopy image periodic distortions with digital signal-processing methods

摘要

Electromagnetic interference is one of the main distortion sources in scanning electron microscopy. Electromagnetic interference-generated scanning electron microscopy image distortions are usually visible as edge blur (at low scan rates) or vibration (at high scan rates). Hardware solutions to this problem, e.g. electrostatic and magnetic shielding, are expensive and, in some cases, difficult to implement. The current investigations led to a significant decrease in the periodic distortions by a novel adaptation of software-based digital signal processing to scanning electron microscopy problems, without any hardware modification.