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A new surface characterization technique: RIMAPS (Rotated Image with Maximum Average Power Spectrum).

机译:一种新的表面表征技术:RIMAPS(具有最大平均功率谱的旋转图像)。

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This work introduces a new imaging technique, Rotated Image with Maximum Average Power Spectrum (RIMAPS), for use in determining orientation and characteristics of surface topography. It consists of computing the maximum value of the averaged power spectrum, given by one step of the two-dimensional Fourier transform, for each angle of rotation of a digitized image. The basic measurement science of this technique is described and different cases are studied. The characterization of simple geometrical figures explains the meaning of peaks and their angular positions given by RIMAPS analysis. A known surface pattern made on a sample of pure copper, mechanically ground, is used to study reproducibility, dependence on image quality and topography scale relative to pixel size and magnification. Samples of pure zinc, mechanically ground and chemically etched, were used to show the main features of RIMAPS analysis when characterizing a more complicated pattern on a real surface. All the studies performed underdifferent conditions for observation and acquisition of images give strong evidence of the stability and robustness of RIMAPS as a technique for the characterization of topography.
机译:这项工作介绍了一种新的成像技术,即具有最大平均功率谱的旋转图像(RIMAPS),用于确定表面形貌的方向和特征。它包括针对数字化图像的每个旋转角度,计算由二维傅里叶变换的一个步长给出的平均功率谱的最大值。描述了该技术的基本测量科学,并研究了不同的情况。简单几何图形的特征​​解释了RIMAPS分析给出的峰的含义及其角位置。机械研磨纯铜样品上的已知表面图案用于研究重现性,相对于像素大小和放大倍数的图像质量和形貌比例的依赖性。在真实表面上表征更复杂的图案时,使用机械研磨和化学蚀刻的纯锌样品来显示RIMAPS分析的主要特征。在不同的条件下进行观察和获取图像的所有研究均提供了RIMAPS作为地形特征表征技术的稳定性和鲁棒性的有力证据。

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