Integrated optic/microfluidic devices have proven to be useful tools in many sensing applications. However, the resolution and sensitivity of existing devices is limited by the processes and materials chosen for their fabrication. A procedure for the production of a new family of low-noise, high-resolution integrated microfluidic optical detection devices is presented, along with results from a prototype device. The device architecture is presented, highlighting design choices made in fluidics and optical integration to minimize scattered light. Diffused waveguides were fabricated, characterized, and modeled. A plasmonic resonator is designed, simulated, and integrated into the system to achieve electric field enhancement and localization to sub-micron dimensions. The device was tested to demonstrate both field enhancement and localization. The procedure that was developed enables the creation of integrated devices capable of high-resolution detection of fluorescent samples. The interrogation region was 200 nm long in the direction of flow, achieving sub-wavelength resolution in an integrated device. Furthermore, discrete fluorescent particles 20 nm in diameter were individually detected, demonstrating the high resolution and sensitivity capabilities of this family of devices.
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