Effects of cyclic temperature change on the out-of-plane deformation and diffraction angle of a surface micromachined curved grating

摘要

This study examines the effects of cyclic temperature changes on the stress-induced bending of a surface micromachined gold-coated curved diffraction grating. The out-of-plane deformation of the grating is analyzed under different temperature conditions using a finite element model. A numerical and experimental investigation is performed into the effects of cyclic temperature changes on the out-of-plane stress-induced deformation of a surface micromachined curved diffraction grating. The results show that the residual stress induced within the gold coating on the cantilever beam supporting the diffraction grating increases with an increasing post-processing temperature and prompts a larger out-of-plane deformation as a result. The correlation between the post-processing temperature and the diffraction angle of the curved grating is also investigated. It is shown that the diffraction angle converges toward a lower limiting value as the temperature is increased toward a value of approximately 250℃.