DESIGN AND FABRICATION OF SURFACE MICROMACHINED MICROMOTORS WITH LARGE DIMENSIONS

摘要

Micromotors with enlarged 800 mu m and 1200 mu m rotor diameters are described in this paper. A large driving torque was obtained by fabricating up to 234 stator and 156 rotor electrodes, Microbridges were used to connect the stator electrodes to the electrical lines and two different electrode designs were investigated. The most favourable electrode geometry and the driving torque was determined by simulating the force per pole. The surface micromachined micromotors have been fabricated and tested successfully. [References: 5]