Demonstration of a single use microsystem valve for high gas pressure applications

摘要

Demonstrated and characterized here is a single use valve developed for high-pressure applications. Incorporated within the single use valve is a particle filter. The filter serves to remove any particle debris created by the activation process. The valve is solder sealed to be leakage proof. The solder is remelted to obtain activation of the valve. Local heater elements are incorporated on the valve surface together with solder wetting pads. The gas mass flow through the device was evaluated prior to sealing and after activation. The valve was functional at pressures of 100 bar, and opened in less than 10 s with an applied power of 13 W.