Fabrication of a microlens array using micro-compression molding with an electroformed mold insert

摘要

Polymeric microlens arrays. with a diameter of 36-96 mum. a radius of curvature of 20-60 mum and a pitch of 250 mum. were fabricated Using micro-compression molding with electroformed mold inserts. We used tile reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities. and surface roughness of the microlenses were measured and analyzed. [References: 18]