Linear thermal expansion coefficients of amorphous and micro crystalline silicon films

摘要

The linear thermal expansion coefficient, beta. of hydrogenated amorphous (a-Si:H) and microcrystalline (pc-Si:H) silicon films has been investigated. The value of beta of a-Si:H and pc-Si:H films was similar to1 x 10(-6) K-1 at room temperature. It is also found that the beta values for thermally annealed a-Si and polycrystalline Si were similar to4 x 10(-6) K-1 at room temperature. coefficients similar to that of single crystalline Si. The linear thermal expansion coefficients in Si films seem to be strongly influenced by the hydrogen incorporation. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 3]