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Application of the optical method for determining of the RMS roughness of porous glass surfaces

机译:光学方法在确定多孔玻璃表面RMS粗糙度中的应用

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摘要

The application of an optical method for characterizing surface roughness is presented. This method was used for an examination of porous glass surfaces. The expressions relating the root mean square rms (sigma) of a surface to its specular reflectance at normal incidence are used for sigma lambda, (lambda - wavelength). For light of sufficiently long wavelength the decrease in the measured specular reflectance due to the surface roughness depends only on the root mean square (rms) height of the surface irregularities. On the basis of reflectance spectra, one can determine a for the porous glass surfaces after technological processes. The measured reflectance spectra were compared with calculated ones for which the scattered component of light was taken into account. The parameters rms determined from the optical method are comparable to those obtained from atomic force microscopy examinations. (C) 2008 Elsevier B.V. All rights reserved.
机译:介绍了表征表面粗糙度的光学方法的应用。该方法用于检查多孔玻璃表面。将表面的均方根均方根(sigma)与其在法向入射时的镜面反射率相关联的表达式用于sigma lambda(λ-波长)。对于足够长的波长的光,由于表面粗糙度导致的镜面反射率的降低仅取决于表面不规则性的均方根(rms)高度。根据反射光谱,可以确定经过工艺处理后的多孔玻璃表面的α。将测得的反射光谱与计算出的反射光谱进行比较,其中考虑了光的散射分量。通过光学方法确定的参数rms与通过原子力显微镜检查获得的参数相当。 (C)2008 Elsevier B.V.保留所有权利。

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