patternable hybride sol-gel material cuts the cost of fabrication of microoptical elements for photonics applications

摘要

A patternable organic-inorganic SiO_2/TiO_2 hybride material was synthesized by using the sol-gel method at room temperature,which can be used for the simple and low cost fabrication of microoptical elements of photonics both with and without a development process.The transmittance of this matrial was characterized with a spectrophotometer in the wavelength range from 200 to 1000 nm.Fourier transform infrared spectroscopy was used to moitor its photochemical activities.To demonstrte its advantages for fabriction of microoptical elements,a spherical microlens array and a cricular cone microlens array were fabricated by using development based and self-development based methods respectively.The latter,self-development based method is a single step fabrication process and only needs a binary mask to control UV light exposure.Thus,this patternable hybrid sol-gel material shows great aplciabilit for the fabrication of microoptical elements and custs the cost ofj traditional photolithography fabrication methods.