Novel fabrication method for Si1-xTixO2 thin films with graded composition profiles by liquid phase deposition

摘要

A novel technique for the direct synthesis of Si1-xTixO2 thin films with graded composition profiles has been studied in aqueous solution, in which the (NH4)(2)SiF6 solutions were added into the (NH4)(2)TiF6 master solution under time- and rate-controlled reaction conditions: the composition of the films in the direction of the film thickness was successfully controlled over a wide range by this technique. [References: 18]