Microanostructured arrays: Fabrication, applications, and devices

摘要

Recently, ordered microanostructured arrays have attracted much interest due to their important applications in field emitters, nanogenerators, sensors, microfluidic devices, optoelectronic devices, and so forth.The traditionalmethods to fabricate microanostructured arrays are generally based on lithographic techniques, for example, photolithography, electron beam lithography, ion beam lithography, and X-ray lithography, to name a few. However, these technologies are usually high costs and time consumption.