Temperature-Dependent Thermal Conductivity of Single-Phase Antimony Thin Films: An Experimental and Theoretical Approach

摘要

In this report, we report both experimental and theoretical studies of the temperature-dependent thermal conductivity of single-phase antimony (Sb) thin films in the temperature ranges of 30-300 K. For this study, we used 100-nm and 200-nm-thick Sb thin films, which were prepared by e-beam evaporation method at room temperature. The measured thermal conductivities of two thin films, which were evaluated by four-point-prove 3-omega method, were in the range of 8.5-37.8 W/m.K in the temperature range of 30-300 K. This result shows clear film thickness and grain size dependences on the thermal conductivity of the films. The experimental results were also theoretically analyzed with both a modified Callaway and Sondheimer models and we found that the theoretical approach corresponds well with the experimental results.