Pulsed Laser Deposition and Ferroelectric Characterization of Nanostructured Perovskite Lead Zirconate Titanate (52/48) Thin Films

摘要

Perovskite lead zirconate titanate nanostructured (PZT) thin films with Zr/Ti ratio of 52/48 were deposited on Pt/TiO_2/SiO_2/Si(100) substrate using pulsed laser deposition method. A metal/ferroelectric/metal (MFM) structure was used for ferroelectric property measurements, formed by depositing gold electrode on top of the film. A Nd:YAG UV laser having a wavelength of 355 nm and an energy fluence of ～2.7 J/cm~2 was used to deposit the film. The film was deposited on platinum (Pt) coated silicon substrate at the substrate temperature of 600℃ and the base vacuum of 10~(-6) mbar. The scanning electron microscopy (SEM) images revealed well-crystallized films with a fine microstructure and an average grain size of ～ 50 nm. The ferroelectric properties of the film were studied and the results were discussed. The voltage dependent Polarization versus Electric field hysteresis measurements of PZT (52/48) pellet showed a well-defined hysteresis loop with a fairly high remnant polarization (P_r) and low coercive field (E_c).