Very Thin Spin-Coated Silver Films via Transparent Silver Ink for Surface Plasmon Resonance Sensor Applications

摘要

We fabricated very thin silver films with thicknesses of 20 nm, 40 nm, and 60 nm on a prism using a spin coating method for surface plasmon resonance (SPR) image sensor module applications. An aqueous silver ionic complex solution was spin-coated and then thermally cured for 10 minutes at 150℃ in an oven. The spin-coated solid silver films possessed silver crystallinity. The prism modules with the 20-nm-, 40-nm- and 60-nm-thick thin silver films were applied to an SPR image sensor system. The coefficients of determination for the 20-nm-, 40-nm- and 60-nm-thick silver films were 0.923, 0.990 and 0.989, respectively when standard ethanol solutions with 0.1% intervals in the range of 20.0% to 20.5% were applied. The correlation is high-performed and the coefficients of determination are as close as 1. The spin coating method of very thin silver films for SPR image sensor modules is expected to be a very cost-effective solution because the films can be formed at a low temperature in a short period of time without requiring a vacuum system.