Analytic Model of a Silicon Nanowire pH Sensor

摘要

A simple analytic model of a silicon-nanowire (Si-NW) pH sensor is proposed; this model is based on the solution of the Poisson equation in cylindrical coordinates and the nonlinear Poisson-Boltzmann equation for the Si-NW and an electrolyte, respectively. The simulation results obtained using the proposed model agree well with the experimental data. By using the proposed analytic model, the dependence of the electrical properties on the Si-NW diameter and doping concentration is investigated.