Design and simulation of high resolution optical imaging system based on near-field using solid immersion lens with NA = 2.2

摘要

In this work, by changing annular aperture zones transmittance, we could get a spot size smaller than any reported one by utilizing annular aperture. Where, by dividing the annular aperture to more than three zones and utilizing of Sony corporation Produced SIL that has NA higher than 2, we could improve imaging resolution for radial polarization (RP); also we could decrease theFWHMfrom around 0.3λ to near 0.26λ. Here, the FWHMvariation, according to the refractive index changing, has decreased to zero for RP. After that, circular polarization (CP) has been introduced to get a spot size less than 0.26λ. This image resolution improving can be applied to enhance optical data storage, microscopes and lithographic and other high accurate optical systems.