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Improving the resolution of grating-assisted optical diffraction tomography using a priori information in the reconstruction procedure

机译:在重建过程中使用先验信息提高光栅辅助光学衍射层析成像的分辨率

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We provide a numerical study of a tomographic microscope in which the sample is deposited on a periodically nanostructured substrate and is illuminated under various incident angles. The map of permittivity of the sample is retrieved numerically from the complex data of the diffracted far-field. A single-scattering analysis shows that, with an optimized grating of period λ/5, the transverse resolution of the digital imager is about λ/10. To ameliorate the resolution further, a priori information is incorporated in the inversion procedure. Fixing the lower and upper bounds of the sample permittivity permits us to obtain a transverse resolution about λ/15.
机译:我们提供了一种层析X射线显微镜的数值研究,其中样品被沉积在周期性的纳米结构基底上,并在各种入射角下被照射。从衍射远场的复杂数据中以数字方式检索样品的介电常数图。单散射分析表明,使用周期为λ/ 5的优化光栅,数字成像仪的横向分辨率约为λ/ 10。为了进一步改善分辨率,将先验信息并入反演程序中。固定样品介电常数的上下限可以使​​我们获得大约λ/ 15的横向分辨率。

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