Gas sensing property of SnO2 sputtered films deposited under different conditions

Yamazaki T.; Tereyama K.; Nakatani N.; Mohamed GA.; Shimazaki T.

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Gas sensing property of SnO2 sputtered films deposited under different conditions

机译：不同条件下沉积的SnO2溅射膜的气敏特性

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来源
《Journal of Materials Science Letters》 |1998年第11期|共4页
作者
Yamazaki T.; Tereyama K.; Nakatani N.; Mohamed GA.; Shimazaki T.;
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原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
Thin-films; Sensors;

机译：薄膜;传感器;

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专利

1. Gas sensing property of SnO2 sputtered films deposited under different conditions [J] . Yamazaki T., Tereyama K., Nakatani N., Journal of Materials Science Letters . 1998,第11期

机译：不同条件下沉积的SnO2溅射膜的气敏特性
2. Effect of density and thickness on H-2-gas sensing property of sputtered SnO2 films [J] . Yamazaki T, Okumura H, Jin CJ, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2005,第3期

机译：密度和厚度对溅射SnO2薄膜H-2-气敏性能的影响
3. Lattice strain effects on the structural properties and band gap tailoring in columnarly grown Fe-doped SnO2 films deposited by DC sputtering [J] . Guillen-Baca Y. B., Vilca Huayhua C. A., Paz Corrales K. J., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2019,第46期

机译：晶格应变对DC溅射沉积的柱状生长的Fe掺杂的SnO2膜剪裁的结构性能和带隙的影响
4. Point Defect Structure and Gas Sensing Properties of V2O5 Thin Films Deposited by RF Reactive Sputtering [C] . Krystyna Schneider 2018 XV International Scientific Conference on Optoelectronic and Electronic Sensors . 2018

机译：射频反应溅射沉积V2O5薄膜的点缺陷结构和气敏特性
5. Structure, mechanical properties, and thermal properties of sputter-deposited nitride and oxide superlattice thin films [D] . Yashar, Philip 1998

机译：溅射沉积的氮化物和氧化物超晶格薄膜的结构，力学性能和热性能
6. Nanostructure and Optical Property Investigations of SrTiO3 Films Deposited by Magnetron Sputtering [O] . Da Xu, Yafei Yuan, Huanfeng Zhu, 2019

机译：磁控溅射沉积SrTiO3薄膜的纳米结构和光学性能研究
7. Influence of annealing temperature on microstructure and H2 sensing properties of Pd-doped SnO2 sputtered thin films [O] . Yanbai Shen, Anfeng Fan, Dezhou Wei, 2015

机译：退火温度对PD掺杂SnOT2溅射薄膜微观结构和H2感测性能的影响

Gas sensing property of SnO2 sputtered films deposited under different conditions

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