Diamond-like carbon (DLC) film has attracted considerable attention because of its extreme properties such as hardness, thermal conductivity, optical transparency and chemical resistance. Applications include scratch-resistant coating, microelectronics packaging, optical coating and coating on plastics [1-3]. DLC film belongs to the amorphous hydrogenated carbon (a-C:H) family whose properties depend strongly on the method and conditions used for the deposition. Methods such as plasma-enhanced chemical vapour deposition (PECVD), ion beam deposition and sputtering have been used for the deposition.
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