X-ray Detection Performance of 100-pixel Superconducting Tunnel Junction Array Detector in the Soft X-ray Region

摘要

The overall performance of a 100-pixel superconducting tunnel junction (STJ) array detector in the soft X-ray region was determined by measuring fluorescent X-rays from light elements. The yield of working STJs in the fabricated detector was 90percent, and the leakage current for these 90 STJs was 11.6 + - 2.5 nA. The STJs had an intrinsic energy resolution for O-K(alpha) X-rays (524.9 eV) of 10.2 + - 1.7 eV (FWHM). The deviation from energy linearity was -0.042 + - 0.45percent, 0.793 + - 0.91percent, and 0.135 + - 1.31percent for O-K(alpha) (524.9 eV), N-K(alpha) (392.4 eV) and B-K(alpha) (183.3 eV) X-rays, respectively. Most of the STJs exhibited uniform X-ray detection characteristics. In addition, the detector could discriminate the N-K(alpha) peak in the fluorescent X-ray spectrum from n-type SiC doped with 300 ppm nitrogen.