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CHARACTERIZATION OF CATHODICALLY DEPOSITED CARBONACEOUS FILMS ON A SILICON SUBSTRATE

机译:硅基质上阴极沉积碳膜的表征

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Carbon-based deposits were electrochemically formed on silicon substrates in ethanol at room temperature. This work was based on the work reported by Namba, who described the electrochemical deposition of diamond from organic solutions. The deposits were analysed using a scanning electron microscope, energy dispersive spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and electrochemical impedance spectroscopy. Scanning electron micrographs showed some crystalline deposits on the silicon. EDS was unable to identify carbon in the film, but did reveal impurities such as sodium, potassium, calcium and zinc. It was later established that the impurities most likely came from impurities in the graphite used for a counter electrode. XPS showed the presence of carbon species, and subsequently Raman spectroscopy was used to classify further the carbon deposits. Raman spectroscopy showed the presence of amorphous carbon in some films, but no diamond peak was observed for any of the films. EIS revealed that the impedance of the deposited films was nearly identical to that of the uncoated silicon, and did not resemble the impedance of diamond. Thus, in this work, carbon-based films were formed electrochemically, but these films were not diamond. [References: 13]
机译:在室温下,在乙醇中在硅衬底上电化学形成碳基沉积物。这项工作基于难波报告的工作,后者描述了有机溶液中金刚石的电化学沉积。使用扫描电子显微镜,能量分散光谱(EDS),X射线光电子能谱(XPS),拉曼光谱和电化学阻抗谱对沉积物进行分析。扫描电子显微照片显示在硅上有一些结晶沉积物。 EDS无法识别薄膜中的碳,但确实发现了钠,钾,钙和锌等杂质。后来确定,杂质很可能来自对电极所用石墨中的杂质。 XPS显示存在碳物质,随后使用拉曼光谱进一步对碳沉积物进行分类。拉曼光谱法显示某些膜中存在无定形碳,但任何膜均未观察到金刚石峰。 EIS显示,沉积膜的阻抗与未涂覆硅的阻抗几乎相同,并且与金刚石的阻抗不相似。因此,在这项工作中,通过电化学方法形成了碳基薄膜,但这些薄膜不是金刚石。 [参考:13]

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