Microwave plasma jet for material processing at 2.45 GHz

摘要

A microwave plasma jet (MPJ) has been used for material processing applications including cutting, welding and glass vitrification. The plasma is formed by the interaction of the high electrical field, generated by the microwave, between the waveguide aperture and the gas nozzle. A variety of gases have been used to produce the plasma including argon, helium and nitrogen. A 6 kW, 2.45 GHz MPJ, constructed using a rectangular waveguide WG9A (WR340), has been investigated.