Micro fabrication by electrochemical process in citric acid electrolyte

摘要

This paper describes micro electrochemical machining of stainless steel in an environmentally friendly electrolyte of citric acid. Electrochemical dissolution region is minimized by applying a few hundred nanosecond duration pulses between the tungsten SPM tip and the work material. Electrochemical machining (ECM) characteristics according to citric acid concentration, feed speed and electric conditions such as pulse amplitude, pulse frequency, and tool electrode baseline potential are investigated through a series of experiments. Micro holes of 60 μm in diameter with the depth of 50 μm and 90 μm in diameter with the depth of 100 μm are perforated using citric acid electrolyte. Square and circular micro cavities are also fabricated by electrochemical milling. This research may contribute to the development of safe and eco-friendly micro manufacturing technology.