AlON phase formation in a tape-cast Al{sub}2O{sub}3/AlN composite

摘要

Whilst the use of Al{sub}2O{sub}3 substrates by tape casting for multilayer ceramics packaging has been well established, the increasing demand for higher performance has resulted in a composite approach whereby AlN is added as a composite phase.The phase transformation in a tape-cast Al{sub}2O{sub}3/AlN composite substrate thus forms the subject of this investigation. Experimental results showed that the reaction of the two phases became significant after 1550℃, forming a new phase AlON assintering proceeded. Higher sintering temperatures induced a greater amount of AlON in the sintered Al{sub}2O{sub}3/AlN tapes. This third phase was due to the presence of MgO, which promoted the formation of AlON in sintered tapes even in the presence ofpurge gases.