Corrosion-Wear Behaviors of Si-Incorporated Diamond-Like Carbon Coatings Deposited on STS 316L for Artificial Hip Joints

摘要

Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at. percent contents were deposited on STS 316L substrates for orthopedic implants by means of r.f. plasma-assisted chemical vapor deposition (r.f. PACVD) technique, using mixtures of benzene (C_6H_6) and silane (SiH_4 as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on wear-corrosion properties in the simulated body fluid environment through the tribological and electrochemical test. It was found that wear and corrosion to resistance of Si-DLC coatings with increasing Si content were improved owing to high sp3 bonding.