High Temperature Oxidation of TiN, TiCN and CrN Thin Films

摘要

The oxidation behavior of TiN, TiCN and CrN coatings sputtered on a steel substrate was investigated at 850 deg C in air. Both TiN and TiCN oxidized to TiO_2, while CrN oxidized to Cr_2O_3. The oxidation resistance decreased in the order of CrN, TiN and TiCN. During oxidation, the outward diffusion of substrate elements such as Fe, Si occurred to a certain degree. The enrichment of substrate element of Cr at the oxide scale and the depletion of nitrogen at the lower part of the unoxidized CrN coating were observed.