Fabrication of Micro Single Chamber Solid Oxide Fuel Cell Using Photolithography and Pulsed Laser Deposition

摘要

This paper focuses on the fabrication of micro-coplanar interdigitated single chamber solid oxide fuel cell (mu-SC-SOFC) using a combination of micropatterning technique and thin-film deposition technology. Photolithography was used to generate the micro-interdigitated photoresist patterns on the substrates. Pulsed laser deposition (PLD) method was used to deposit thin films of microstructured electrolytes yttrium stabilized zirconia (YSZ) and electrodes (anode: YSZ + NiO and cathode: lanthanum strontium ferrous cobalt (LSCF)). Process parameters were optimized to obtain consistent functional microstructure and crystal morphology. This research shows good potential for combinatorial manufacturing methods to fabricate high quality and repeatable micro fuel cell components.