Adhesion and Adhesional Friction of Micromechanical Surface Contact

摘要

In this study, a model that predicts the effects of roughness parameters on the adhesion and adhesional friction in MEMS interfaces is presented. The multiasperity contact model is developed based on assumption of Johnson adhesion model. It is found that adhesion and adhesional friction of MEMS surfaces increases with increment of smoothness of surfaces. Very smooth surface contact produces high adhesive force and adhesional friction force whereas rough surface supports high external force through high asperity deformation.