Simulation of Nonstationary Temperature Fields of a Thermostable Substrate for a Proportional Temperature Regulator

摘要

Multidimensional nonstationary temperature fields of a thermostable substrate for a proportionaltemperature regulator of a hybrid thin-film microthermostat have been numerically calculated with account forthe real heat transfer mechanisms for the purpose of determination of the maximum static error of controllingthe temperature of the substrates with different heat conduction depending on the range of the ambient temper-ature variation.