The deposition of a protective film to increase the hardness of an organic photoconductor (OPC) surface is an effective method of lengthening the lifetime of the OPC. In this work, diamond-like carbon (DLC) protective films were deposited onto OPC samples by the electron cyclotron resonance (ECR)-microwave plasma chemical vapor deposition (MPCVD) method with low substrate temperature. The DLC films were deposited with optimized deposition conditions and exhibited high transmissivity and high electrical resistivity. The films caused a remarkable increase in the hardness of the OPC surface, by a factor of 2.5-5.4. The acceptance voltage, dark decay rate, photodischarge rate, and contrast potential of the OPC protected by DLC film were improved. These results show DLC is a suitable protective film for OPC.
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