Increase Mechanism of Indium-Tin-Oxide Work Function by KrF Excimer Laser Irradiation

摘要

In this study,the increase mechanism of the indium-tin-oxide (ITO) work function (phi_W) by KrF excimer laser irradiation was investigated.From the observed x-ray photoelectron spectroscopy (XPS) results and four-point probe measurements,it is suggested that the surface chemical changes and the laser irradiation time had strong effects on the phi_W of ITO.Incorporation of oxygen atoms near the ITO surface during laser irradiation induced a peroxidic ITO surface,increasing phi_W.The induced increase of the ITO phi_W by laser irradiation could be useful for the enhancement of the hole injection in organic light emitting diodes.