Ellipsonmetric and microwave reflectivity studies of current oscilaltions during anodic dissolution of p-Si in fluoride solutions

S. Bohm; L.M. Peter; G. Schlichtohorl

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Ellipsonmetric and microwave reflectivity studies of current oscilaltions during anodic dissolution of p-Si in fluoride solutions

机译：氟溶液中p-Si阳极溶解过程中电流振荡的椭偏和微波反射率研究

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摘要

Periodic current socillations during anodic dissolution of monocrystalline p-Si(100) in buffered ammonium fluoride solutions (0.1 mol dm~(-3) fluoride, pH 4.5) were investigated using a flow cell in order to eliminate mass transport limitations.

机译：使用流通池研究了单晶p-Si（100）在缓冲氟化铵溶液（0.1 mol dm〜（-3）氟化物，pH 4.5）中的阳极溶解过程中的周期性电流振荡，以消除质量传输限制。

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《Journal of Electroanalytical Chemistry: An International Journal Devoted to All Aspects of Electrode Kinetics, Interfacial Structure, Properties of Electrolytes, Colloid and Biological Electrochemistry》 |2001年第2期|共7页
作者
S. Bohm; L.M. Peter; G. Schlichtohorl;
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正文语种 eng
中图分类化学工业;
关键词
silicon; fluoride; etching; ellipsometry; microwave; oscilaltions;

机译：硅;氟化物;蚀刻;椭圆光度法;微波;振荡;

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2. Ellipsonmetric and microwave reflectivity studies of current oscilaltions during anodic dissolution of p-Si in fluoride solutions [J] . S. Bohm, L.M. Peter, G. Schlichtohorl Journal of Electroanalytical Chemistry: An International Journal Devoted to All Aspects of Electrode Kinetics, Interfacial Structure, Properties of Electrolytes, Colloid and Biological Electrochemistry . 2001,第1a2期

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Ellipsonmetric and microwave reflectivity studies of current oscilaltions during anodic dissolution of p-Si in fluoride solutions

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