Antireflection Characteristics of Nanorod Arrays and Nanohole Arrays Based on Si Substrate

摘要

We investigate antireflection characteristics of nanorod arrays and nanohole arrays of three different kinds of shapes based on Si substrate via simulation. Cosine, parabola and cone shapes are considered in this paper. To precisely control the shapes of nanostructured arrays, we use formula to model these structures. We have studied the antireflection characteristics of nanorod arrays and nanohole arrays respectively. We find that for the nanorod arrays, cosine-shaped nanostructure is almost equal to the parabola-shaped one and better than the cone-shaped one in terms of antireflection and that for the nanohole arrays of different profiles, the antireflection levels are almost the same. Above all, we have shown that nanorod arrays are more suitable for broadband antireflection than nanohole arrays.