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Hardness and Young's modulus of nanoporous EB-PVD YSZ coatings by nanoindentation

机译:纳米压痕法制备纳米多孔EB-PVD YSZ涂层的硬度和杨氏模量

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摘要

A nanoindentation technique for determining hardness and Young's moduli is applied to electron beam-physical vapor deposition (EB-PVD) ZrO_2-4mol percent Y_2O_3 coatings. The porosity of the coatings increased with increasing substrate rotation speed during deposition. The hardness and Young's modulus showed a significant dependence on the substrate rotation speed and measurements made on columnar structures were strongly anisotropic. The hardness and Young's modulus of the surface regions of the coatings is found to be higher than that of the side regions. The hardness and Young's moduli of the surface regions of the coatings have a nearly constant value of approximately 10 GPa and 230-250 GPa, respectively, whereas those of the side areas decreased with increasing substrate rotation speed.
机译:一种用于确定硬度和杨氏模量的纳米压痕技术被应用于电子束物理气相沉积(EB-PVD)ZrO_2-4mol%Y_2O_3涂层。涂层的孔隙率随着沉积过程中基材旋转速度的增加而增加。硬度和杨氏模量显示出对基底旋转速度的显着依赖性,并且在柱状结构上进行的测量是强烈各向异性的。发现涂层的表面区域的硬度和杨氏模量高于侧面区域的硬度和杨氏模量。涂层表面区域的硬度和杨氏模量分别具有近似恒定的值,分别约为10 GPa和230-250 GPa,而侧面区域的硬度和杨氏模量则随着基材转速的增加而降低。

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