Discharge Plasma Characteristics in Pure Ar Gas at Multi-Atmospheric Pressure Using the Automatically Pre-Ionized Plasma Electrode

摘要

For the investigation of the possibility of the discharge-pumped Ar_2* excimer laser oscillation whose wavelength is 126 nm,characteristics of the main-discharge in pure Ar at multi-atmospheric pressure (1approx 5 atm) have been investigated using the automatically pre-ionized (API) plasma electrode.It was demonstrated that the uniform pre-ionization formed the uniform main-discharge and that the maximum energy deposition into main-discharge increased.The control effect of capacitance C_(pr) was examined.It was compared with the light intensity of the main-discharge taken by integrated photograph and the two-dimensional simulation of the electric field distribution of the API plasma electrode discharge system.