Idemitsu to Make ArF Photoresist Material Adamantane

摘要

Idemitsu Kosan will embark on its own production of adamantane,the raw material of argon-fluoride(ArF)photoresist.Construction will start in January 2007 on the ￥1.3 bn(11.14 mn),300-t/y facility at its Tokuyama site(Yamaguchi Prefecture),for completion in September and targeted commercial startup in January 2008.It will be the first production of adamantane in Japan.