Production of Silanes ~(29)SiH4 and ~(30)SiH4 of High Chemical and Isotopic Purity

摘要

In recent years, methods of production of isotope-enriched substances of high isotopic and chemical purity have been actively studied. Considerable attention has been focused on the preparation and properties of monoisotopic ~(29)Si and ~(30)Si. They can be used for designing new semiconducting structures (~(28)Si/~(29)Si and ~(29)Si/~(30)Si superlattices) and other devices [1,2].