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Enhanced sealing performance with CVD nanocrystalline diamond films in self-mated mechanical seals

机译:自配合机械密封中的CVD纳米晶金刚石薄膜增强了密封性能

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摘要

Nanocrystalline diamond (NCD) films were evaluated as protective tribo-coatings on silicon nitride mechanical seal rings. The NCD films were deposited by microwave plasma assisted chemical vapour deposition (MPCVD) method from a CH_4/H_2/N_2 gas mixture. The sealing performance and friction behaviour of self-mated NCD films were assessed using the ring-on-ring tribological test in planar configuration varying the rotating speed and the applied load. Water sealing conditions were obtained in the P centre dot V (P, the effective pressure and V, the linear speed) range of 0.5-4.8 MPa ms~(-1). The high hardness and smoothness of the NCD films resulted in a very low and stable friction coefficient value of 0.01, without any measurable wear.
机译:评估了纳米晶金刚石(NCD)膜作为氮化硅机械密封环上的保护性摩擦涂层。通过微波等离子体辅助化学气相沉积(MPCVD)方法从CH_4 / H_2 / N_2气体混合物中沉积NCD膜。使用环对环摩擦测试在平面配置中改变转速和施加的载荷,评估了自交配NCD膜的密封性能和摩擦性能。在0.5-4.8 MPa ms〜(-1)的P中心点V(P,有效压力和V,线速度)范围内获得水密封条件。 NCD膜的高硬度和光滑度导致非常低且稳定的摩擦系数值为0.01,而没有任何可测量的磨损。

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