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Back-scattering CARS diagnostics on CVD diamond

机译:CVD金刚石上的反向散射CARS诊断

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摘要

Raman spectroscopy has developed as a major technique to determine the quality of chemical vapor deposited (CVD)-grown diamond films. However the use of spontaneous Raman spectroscopy for in-situ measurements is difficult due to the highluminosity of the CVD reactor. We demonstrate the technique of back-scattering coherent anti-stokes Raman spectroscopy (CARS) as a new way to measure the Raman spectrum of polycrystalline diamond films. After further optimization hack-scattering CARSshould prove useful as a tool for in-situ diagnostics during diamond film growth.
机译:拉曼光谱法已经发展成为确定化学气相沉积(CVD)生长的金刚石薄膜质量的主要技术。然而,由于CVD反应器的高发光度,难以将自发拉曼光谱用于现场测量。我们展示了背散射相干反焦化拉曼光谱技术(CARS)作为测量多晶金刚石薄膜拉曼光谱的新方法。经过进一步优化后,散斑散射CARS应该被证明是在金刚石膜生长过程中进行现场诊断的有用工具。

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