A novel fabrication approach for carbon nanotube lateral field emission devices

摘要

A novel fabrication approach for growing carbon nanotubes (CNTs) laterally and selectively on the tip region of lateral micro-fingers with built-in metallic anode utilizing a single-mask microfabrication process is presented. The selective growth of the CNTs was achieved with a two-step microwave plasma-enhanced chemical vapor deposition process involving a pre-growth hydrogen plasma treatment. Without plasma pretreatment, CNTs were found to grow along edges of the sandwiched tri-metal layer including the anode. Interestingly, with plasma pretreatment, CNTs grew selectively near the sharp tip region. Moreover, specific CNTs could be selectively synthesized on the tip region by optimizing the plasma pretreatment and the growth time. In essence, a lateral field emission device having CNT emitters with integrated metallic anode can be fabricated in just a single-mask microfabrication process. This approach can enhance the feasibility of integrating CNTs into vacuum integrated circuits.