BCN films with controlled composition obtained by the interaction between molecular beams of B and C with nitrogen ion beams

摘要

Ternary BCN compounds with controlled composition have been synthesised by using independent molecular fluxes of B and C supplied from two different electron beam evaporators, and concurrent N_2~+ ions from a Kauffman ion gun fed with nitrogen gas. We have established experimentally the correspondence between the ratio of B/C/N atoms arriving at the substrate and the actual film composition measured by energy dispersive X-ray spectroscopy. The composition of the BCN films does not follow simply the ratio of the impinging B/C/N fluxes, but it is determined by the complex interplay of several factors, such as the reactivity between the different species, its sticking coefficient and the possibility of formation of volatile moieties.