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Relationship between grain boundaries and broad luminescence peaks in CVD diamond films

机译:CVD金刚石膜中晶界与宽发光峰之间的关系

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摘要

Broad luminescence bands have been frequently observed by micro-photoluminescence (PL) spectroscopy of bulk samples of polycrystalline CVD diamond films; however, no definitve explanation exists for them at present. In an attempt to clarify the situation, a successful method for correlating TEM images with micro-PL spectroscopy has been developed and some links between grain boundaries and broad-band luminescence have been found. The samples studied were polycrystalline B-doped (boron doping at approx= 10~(18) cm~(-3)) and unintentional N-doped (nominally undoped) CVD diamond films prepared for plan view TEM and analysed by micro-Pl spectroscopy.
机译:经常通过微光致发光(PL)光谱法观察多晶CVD金刚石薄膜的大量样品的宽发光带。但是,目前尚无明确的解释。为了澄清这种情况,已经开发了一种成功的将TEM图像与微PL光谱相关联的方法,并且发现了晶界与宽带发光之间的某些联系。研究的样品是多晶B掺杂的(硼掺​​杂约为10〜(18)cm〜(-3))和无意的N掺杂(名义上无掺杂)的CVD金刚石薄膜,用于平面TEM并通过微Pl光谱分析。

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