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Methane-induced texturing of chemical vapor deposition diamond films and correlation with UV photoresponse

机译:甲烷诱导的化学气相沉积金刚石膜的织构化及其与紫外光响应的关系

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The aim of the present work was to investigate the correlation between response to UV photons andcrystal orientation in diamond films. Some chemical vapor deposition diamond samples were exposedto UV radiation (4-6 eV) and the photocurrent measured applying several electric fields. Theorientation of diamond films has been checked by X-ray diffraction and the resulting spectra wereused to define the percentage of texture. The results of our experiments show a clear correlationbetween UV photoresponse and film texture, obtained by varying the methane concentration in thegrowth plasma. Also, less oriented polycrystalline films have a better response than highly (100)textured films in terms of photocurrent and signal to noise ratio.
机译:本工作的目的是研究金刚石膜中对紫外线光子的响应与晶体取向之间的相关性。将一些化学气相沉积的金刚石样品暴露于UV辐射(4-6 eV),并通过几个电场测量光电流。金刚石膜的取向已通过X射线衍射检查,所得光谱用于定义织构百分比。我们的实验结果表明,通过改变生长等离子体中的甲烷浓度,紫外线光响应与薄膜质地之间存在明显的相关性。同样,就光电流和信噪比而言,取向较弱的多晶膜的响应要比高度(100)纹理的膜好。

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