Optical properties of diamond-like carbon films containing SiO_x

摘要

In this article the optical properties of amorphous diamond-like carbon (DLC) films containing SiO_x (DLC: SiO_x) prepared by plasma enhanced chemical data obtained within variable angle spectroscopic ellipsometryand near-normal spectroscopic model of the optical constants charactation of these combined experimental data is performed using a new empiricla dispersion density of the electronic states belonging to both the valence and conduction bands. It is shown that there are strong differences between spectral dependences of the optical constants of the DLC films on the one hand and DLC:SiO_x films on the other hand. further, it is shown that theabsorption of small amounts of the silicon and oxygen impurities contained in the DLC films strongly influence their optical properties.