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Fabrication of vertically aligned carbon nanostructures by microwave plasma-enhanced chemical vapor deposition

机译:通过微波等离子体增强化学气相沉积制备垂直排列的碳纳米结构

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摘要

Carbon nano-rope films were fabricated on the Ni-catalysed Si substrate by microwave plasma-enhanced chemical vapor deposition employing a mixture of acetylene and hydrogen. These nano-ropes were in the form of self-assembled, stranded carbon nano-fibers and were aligned perpendicular to the substrate. The field emission characteristics for the nano-rope films were observed.
机译:通过使用乙炔和氢的混合物通过微波等离子体增强化学气相沉积法,在Ni催化的Si衬底上制备了碳纳米绳膜。这些纳米绳呈自组装的,绞合的碳纳米纤维的形式,并垂直于基材排列。观察了纳米绳膜的场发射特性。

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