HREM study of ultra-thin, amorphous carbon films and structural changes of carbon forms to diamond under ion bombardment

摘要

High-resolution electron microscopy studies of ultra-thin diamond-like amorphous carbon films are presented to investigate the initial stages of film growth and the formation of new carbon phases as well as their transformation to diamond underion treatment. Films with a thickness of ~ 3 nm were deposited by r.f. magnetron sputtering at room temperature on a (001) Si clean surface. Specimens that were prepared for plan-view HREM observations only by chemical thinning revealed carboncrystallites which are attributed to cubic carbon or to chaotic. The analysis shows that two cubic phases are present. Specimens of the same films prepared only by ion bombardment contain nuclei in which lattice fringes with a spacing equal to that of the (111) planes of diamond are resolved.