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High temperature thermal conductivity of free-standing diamond films prepared by DC arc plasma jet CVD

机译:DC电弧等离子体射流CVD制备的自支撑金刚石膜的高温热导率

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摘要

Free-standing diamond films with 1.68 mm in polished thickness have been prepared by DC arc plasma jet CVD. By means of simply changing the placing orientation of diamond films along the laser transmission direction while testing, the through-thickness thermal conductivity (kappa(perpendicular to)) together with the in-plane (kappa(//)) thermal conductivity of free-standing diamond films were measured by laser flash technique over a wide temperature range. Results show that the thermal conductivity kappa(perpendicular to) and kappa(//) of free-standing diamond films are up to 1916 and 1739 Wm(-1) K-1 at room temperature, respectively, showing small anisotropy (9%), and following the relationship kappa similar to T-n as temperature rises. The conductivity exhibits similar value compared to that of high-quality single crystal diamond above 500 K for both through-thickness and in-plane directions of CVD diamond films. The effects of impurities and grain boundaries on thermal conductivity of diamond films with increasing temperature were discussed. (C) 2014 Elsevier B.V. All rights reserved.
机译:通过直流电弧等离子体喷射CVD已经制备了抛光厚度为1.68mm的自支撑金刚石膜。通过在测试时简单地改变金刚石膜沿激光传输方向的放置方向,就可以将自由层的全厚度热导率(kappa(垂直于))与面内热导率(kappa(//))结合在一起。在很宽的温度范围内,通过激光闪光技术测量了直立的金刚石膜。结果表明,在室温下,自支撑金刚石薄膜的导热系数kappa(垂直于)和kappa(//)分别高达1916和1739 Wm(-1)K-1,显示出较小的各向异性(9%) ,并且随着温度升高遵循与Tn相似的关系kappa。对于CVD金刚石膜的贯穿厚度和面内方向,其电导率均与500 K以上的高质量单晶金刚石相比具有相似的值。讨论了随着温度的升高,杂质和晶界对金刚石薄膜导热性的影响。 (C)2014 Elsevier B.V.保留所有权利。

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