X-ray photoemission spectroscopic study of ultrananocrystallinediamond/hydrogenated amorphous carbon composite films prepared by pulsedlaser deposition

摘要

Chemical bonding configurations of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon(a-C:H) composite films prepared by pulsed laser ablation of graphite were investigated by X-ray photo-emission spectroscopy using synchrotron radiation. The spectra were decomposed using a Voigt function afterthe backgrounds were subtracted by Shirley's method. A narrow full-width half-maximum of the sp~3 peak isspecific, which might be attributed to existence of a large number of UNCD crystallites in the film. The widthwas immediately broadened by an argon ion bombardment. Its value became equivalent to that of the a-C:Hfilm after the ion bombardment in the same manner. This implies that UNCD crystallites were easily damagedand destroyed by the ion bombardment.